Article In: scopus, cienciavitae, orcid

Versatile reactor for LCVD large films production

Vacuum

Conde, O.; Deus, A.M.; Silvestre, A.C. — 1989

Key information

Authors:

Conde, O.; Deus, A.M. (Augusto Manuel Moura Moita de Deus); Ferreira, M.L.G.; Silvestre, A.C.

Published in

01/01/1989

Publication details

Authors in the community:

Publication version

AO - Author's Original

Title of the publication container

Vacuum

First page or article number

861

Last page

861

Volume

39

Issue

7-8

DOI

10.1016/0042-207x(89)90061-4

Fields of Science and Technology (FOS)

materials-engineering - Materials engineering

Publication language (ISO code)

eng - English

Alternative identifier (URI)

http://www.scopus.com/inward/record.url?eid=2-s2.0-0024880977&partnerID=MN8TOARS

Rights type:

Only metadata available