Article In: scopus, orcid

Improving the lubrication of silicon surfaces using ionic liquids as oil additives: the effect of sulfur-based functional groups

Tribology Letters

Mónica Antunes; Mariana T. Donato; Benilde Saramago2020Springer

Key information

Authors:

Mónica Antunes (Mónica Sofia Hoyos Antunes); Mariana T. Donato; Victória Paz; Fernando Caetano (Fernando José Pires Caetano); Luís Santos (Luís Filipe da Silva dos Santos); Rogério Colaço (Rogério Anacleto Cordeiro Colaço); Luís C. Branco; Benilde Saramago (Benilde de Jesus Vieira Saramago)

Published in

05/30/2020

Abstract

The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C4SO3H)MIM][TfO], thiamine triflate [Thiamine][TfO]2, 1-ethyl-3-methylimidazolium camphorsulfonate [C2MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C1-3pic][MeSO4], methylimidazolium methanesulfonate [HMIM][MeSO3], and tetramethylguanidine methanesulfonate [TMG][MeSO3]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO4]− and [MeSO3]−. The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces.

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Publication version

VoR - Version of Record

Publisher

Springer

Link to the publisher's version

https://link.springer.com/article/10.1007/s11249-020-01308-7

Title of the publication container

Tribology Letters

Volume

68

Fields of Science and Technology (FOS)

materials-engineering - Materials engineering

Keywords

  • Ionic liquids
  • Additives
  • Silicon
  • Friction coefficient

Publication language (ISO code)

eng - English

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