Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates

February 9, 2021

<jats:p>Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O2/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O2/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoOx films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm3. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.</jats:p>

Authors in the community:

• 

  S

  Sérgio Nuno Canteiro de Magalhães

  ist46927

  Affiliations and sources

  IST > IPFN

  Instituto de Plasmas e Fusão Nuclear

  In: orcid

  ID: 88799846

VoR - Version of Record

MDPI AG

https://www.mdpi.com/1996-1944/14/4/821

Materials

821

14

4

1996-1944

10.3390/ma14040821

physical-sciences - Physical sciences

Keywords

• General Materials Science

eng - English