Article In: orcid, cienciavitae

Effect of Annealing on Al Diffusion and its Impact on the Properties of Ga2O3 Thin Films Deposited on c‐Plane Sapphire by RF Sputtering

physica status solidi (RRL) – Rapid Research Letters

Sousa, Ana Sofia; Magalhães Esteves, Duarte ; Peres, Marco — 2025

Key information

Authors:

Sousa, Ana Sofia (Ana Sofia Camões de Sousa); Magalhães Esteves, Duarte (Duarte Magalhães Esteves); Tiago T. Robalo; Mario S Rodrigues; Luís F. Santos (Luís Filipe da Silva dos Santos); Lorenz, Katharina; Peres, Marco

Published in

04/14/2025

Publication details

Authors in the community:

Publication version

AO - Author's Original

Title of the publication container

physica status solidi (RRL) – Rapid Research Letters

DOI

10.1002/pssr.202500053

Fields of Science and Technology (FOS)

physical-sciences - Physical sciences

Publication language (ISO code)

eng - English

Alternative identifier (URI)

https://doi.org/10.1002/pssr.202500053

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