Article In: scopus

Use of the gamma function for straggling in simulation of RBS spectra

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Barradas N.P.; Pezzi R.P.; Baumvol I.J.R.2007

Key information

Authors:

Barradas N.P. (Nuno Pessoa Barradas); Pezzi R.P.; Baumvol I.J.R.

Published in

August 1, 2007

Abstract

In standard computer codes for the analysis of RBS data, the energy straggling is taken to be a Gaussian function. This leads to unphysical simulations whenever the energy spread is comparable to the average energy loss and to the system resolution, which may happen in the near surface region. We propose to use the gamma distribution for the energy straggling, since it asymptotically approaches the Gaussian distribution for small values of the energy spread relative to average energy loss, while it has no high energy tail above the initial beam energy. This was implemented in the code NDF. We compare the results with calculations made with the stochastic model for 100 keV protons in Hf delta layers in Si and show that a major improvement is obtained with regard to the Gaussian distribution. We also show calculations for 1.5 MeV He-4(+) experiments. (c) 2007 Elsevier B.V. All rights reserved.

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Title of the publication container

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

First page or article number

422

Last page

425

Volume

261

Issue

1-2

Fields of Science and Technology (FOS)

physical-sciences - Physical sciences

Publication language (ISO code)

eng - English

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