Article

A general artificial neural network for analysis of RBS data of any element with Z between 18 and 83 implanted into any lighter one- or two-element target

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Barradas, NP; Patricio, RN; Vieira, A — 2004

Key information

Authors:

Barradas, NP (Nuno Pessoa Barradas); Patricio, RN; Pinho, HFR; Vieira, A

Published in

June 2004

Abstract

We report a generalisation of previous works where artificial neural networks (ANNs) were successfully applied for specific implantations such as Er in sapphire or Ge in Si. We have now developed a code that it is able to analyse data from implantations of any element with Z between 18 and 83 into any target composed of one or two lighter elements. Although this problem is considerably more complex than single-system ANNs, the ANN developed produced excellent results when applied to experimental data. (C) 2004 Elsevier B.V. All rights reserved.

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Title of the publication container

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

First page or article number

105

Last page

109

Volume

219

Fields of Science and Technology (FOS)

physical-sciences - Physical sciences

Publication language (ISO code)

eng - English

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