Article In: orcid, scopus
N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction
Plasma Sources Science and Technology
2020
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Published in
08/01/2020
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Title of the publication container
Plasma Sources Science and Technology
Volume
29
Issue
8
Fields of Science and Technology (FOS)
physical-sciences - Physical sciences
Publication language (ISO code)
eng - English
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